A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation
نویسندگان
چکیده
منابع مشابه
Nanoscale topographic pattern formation on Kr-bombarded germanium surfaces
(Received 3 July 2012; accepted 30 January 2013; published 19 February 2013) The nanoscale pattern formation of Ge surfaces uniformly irradiated by Krþ ions was studied in a low-contamination environment at ion energies of 250 and 500 eV and at angles of 0 through 80 . The authors present a phase diagram of domains of pattern formation occurring as these two control parameters are varied. The r...
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A class of simple, (2+1)-dimensional, discrete models is reviewed, which allow us to study the evolution of surface patterns on solid substrates during ion beam sputtering (IBS). The models are based on the same assumptions about the erosion process as the existing continuum theories. Several distinct physical mechanisms of surface diffusion are added, which allow us to study the interplay of e...
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The temporal evolution of ripple pattern on Ge, Si, Al 2 O 3, and SiO 2 by low-energy ion beam erosion with Xe (+) ions is studied. The experiments focus on the ripple dynamics in a fluence range from 1.1 × 10(17) cm(-2) to 1.3 × 10(19) cm(-2) at ion incidence angles of 65° and 75° and ion energies of 600 and 1,200 eV. At low fluences a short-wavelength ripple structure emerges on the surface t...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2020
ISSN: 0021-8979,1089-7550
DOI: 10.1063/5.0021308